Design and simulation of novel RF MEMS cantilever switch with low actuation voltage

In this paper a novel RF MEMS cantilever type switch with low actuation voltage is presented. The cantilever beam of switch is supported by two L-shaped springs to reduce the spring constant. The switch is simulated using Intellisuite software. The actuation voltage of switch is achieved about ۲ volt and the size of the switch is ۱۱۰×۶۰µ۲m, that in compared with other electrostatic cantilever beam switch, it has a small size, low spring constant and as a result low actuation voltage. Its fabrication is simple due to its simple design. The S-parameters of switch have been simulated with HFSS ۹.۱ that the results show the insertion loss of ۰.۰۷ dB, return loss ۰f ۲۵ dB and ۱۷ dB isolation for V, Ka frequencies band. The results show proper performance of switch in this frequencies band and it had less insertion loss compare pervious work and with these properties of switch, return loss and isolation did not changed much.

Keywords:

khadijeh khodadady , en , Babol noshirvani university , Master university , Department of electrical and computer engineering