A New Method for Eliminating Cross Axis Sensitivity in Two Axis Capacitive Micromachined Accelerometers

A novel two axis capacitive micromachined accelerometer is designed and simulated. Only a single seismic mass is employed for detecting the acceleration in bothdirections. Cross axis sensitivity between x axis (in-plane) and z axis (out-plane) has been eliminated. The accelerometer isdesigned for automotive applications with the Range of allowedacceleration in horizontal direction (x axis) of ±50g and vertical direction (z axis) of ±20g. Total structure dimension is 1.16mm×1mm×20μm

Keywords:

Cross axis sensitivity , MEMS , capacitive accelerometer , fringe capacitance