A New Method for Eliminating Cross Axis Sensitivity in Two Axis Capacitive Micromachined Accelerometers
Publish place: 21th Iranian Conference on Electric Engineering
Publish Year: 1392
Type: Conference paper
Language: English
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Document National Code:
ICEE21_391
Index date: 18 August 2013
A New Method for Eliminating Cross Axis Sensitivity in Two Axis Capacitive Micromachined Accelerometers abstract
A novel two axis capacitive micromachined accelerometer is designed and simulated. Only a single seismic mass is employed for detecting the acceleration in bothdirections. Cross axis sensitivity between x axis (in-plane) and z axis (out-plane) has been eliminated. The accelerometer isdesigned for automotive applications with the Range of allowedacceleration in horizontal direction (x axis) of ±50g and vertical direction (z axis) of ±20g. Total structure dimension is 1.16mm×1mm×20μm
A New Method for Eliminating Cross Axis Sensitivity in Two Axis Capacitive Micromachined Accelerometers Keywords:
A New Method for Eliminating Cross Axis Sensitivity in Two Axis Capacitive Micromachined Accelerometers authors
Hadi Tavakoli
Microelectronics Research Laboratory Urmia University