Investigation of Drilling Silicon Nitride Ceramics Using an Ultrasonic Machining System and Analysis of Influential Parameters on Material Removal Rate

Silicon nitride ceramics, known for their excellent resistance to thermal shock and corrosion by molten metals, are among the most widely used advanced ceramics in military, medical, automotive, and other high-technology industries. Owing to their high hardness, good thermal stability, and superior wear resistance, one of the primary applications of these ceramics is the fabrication of ceramic cutting tools. Among the suitable methods for machining hard and brittle materials such as silicon nitride ceramics, ultrasonic machining is particularly effective. In ultrasonic machining, the presence of multiple variables influencing the material removal rate underscores the importance of identifying optimal machining parameters to reduce production costs, increase process efficiency, and achieve a desirable surface finish. Consequently, the ability to predict the material removal rate has become crucial in production planning. In this study, drilling of silicon nitride ceramics using an ultrasonic machining system is investigated. A ductile steel tool and a slurry composed of silicon carbide particles suspended in water are employed. By systematically varying machining parameters such as static load and ultrasonic vibration power, the experimental results reveal the influence of machining conditions and variables on the material removal rate.

Keywords:

Silicon nitride ceramics , Ultrasonic machining , Material removal rate , Machining parameters , Surface finish