Study on the Divergence Instability of an Electrostatically Actuated Cantilever Nanobeam Considering Van der waals Force

In this paper the static instability of a cantilever nanobeam with considering van der waals force and fringing field effect is investigated. The nonlinear differential equation of the model is converted into linear equation by using step-by-step increasing applied voltage of electrostatic and van der waals forces and applying calculus of variation. The obtained linear differential equation is solved using finite difference method. The detachment length and minimum separation gap of the cantilever type nanobeam are given, which play major roles in the design of NEMS switches.

Keywords:

pull-in voltage , nanobeam , collapse