A short review on the glancing angle deposition (GLAD) used for thin films as a new technique

Glancing angle deposition (GLAD) is a new technique of oblique angle deposition (OAD) which the substrate holders is may be mounted at a steep angle with respect to the vapor flux. The GLAD achieves geometric shadowing where incoming line of sight flux lands onto only higher parts of the developing film in order to enhance film roughness, porosity and thickness. This new technique has effects on the microstructure changes of thin films of ceramics, metals, polymers and composites. GLAD combines physical vapor deposition (PVD) with computer-controlled substrate motion to create engineered nanostructures thin films .Thus its application contains different industry such as in optical, mechanical and physical devises. Therefore in this paper; we reviewed papers around the GLAD methods about its basic, deposition parameter control, applications and recent results of researchers.