Fabrication and Characterization of NiTi-based Shape Memory Thin Films
Publish Year: 1384
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
ICME07_069
تاریخ نمایه سازی: 6 آذر 1388
Abstract:
NiTi-based shape memory thin films have attracted much attention in recent years as intelligent and functional materials in the rapidly growing field of Micro-Electro- Mechanical-Systems (MEMS) and Bio-MEMS. In this paper the fabrication of NiTi and NiTiHf thin films by a DC magnetron sputtering using simultaneous deposition from elemental targets is reported. The characterization of the films were performed using a differential scanning calorimetry (DSC) and X-ray diffractometry (XRD) to explore transformation temperatures and structure as a function of film composition. The results showed that film composition is a critical issue to control transition temperatures. The proposed technique can be considered as a flexible fabrication method to control precise film composition, which leads to manufacturing of shape memory microactuators in a wide range of applications.
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Authors
S Sanjabi
Department of Materials Science andEngineering, Sharif University of Technology,P.O.Box: ۱۱۳۶۵-۹۴۶۶, Tehran-Iran.
S.K Sadrnezhaad
Department of Materials Science andEngineering, Sharif University of Technology,P.O.Box: ۱۱۳۶۵-۹۴۶۶, Tehran-Iran.
Z.H Barber
Device Materials Group, Department of MaterialsScience and Metallurgy, University of Cambridge,CB۲ ۳QZ, UK.
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