Ambient Temperature Variation Effect on Thermoelastic Damping Quality Factor in a Capacitive Micro-beam Resonator

This paper deals with effects of ambient temperature and bias DC voltage on thermoelastic Damping (TED) in micro-beam resonators. Equations of coupled thermoelastic case for a capacitive micro-beam resonator have been governed using two dimensional non-Fourier heat conduction model based on continuum theory frame with one relaxation time. Galerkin discretization method and complex-frequency approach have been used for analyzing TED for the first mode of vibration of the micro-beam resonator with both ends clamped and isothermal. By applying two dimensional hyperbolic heat conduction model, the effect of ambient temperature variation on thermoelastic damping has been studied in this paper. As results show, the increment of ambient temperature decreases the quality factor of thermoelastic damping (QTED). The effect of bias DC voltage on QTED for an electrostatically deflected micro-beam has been investigated. The results show that the bias DC voltage decreases the QTED, and its influence is more considerable in the vicinity of pullin voltage.

Keywords:

MEMS , Thermoelastic damping , Ambienttemperature , Hyperbolic heat conduction model , Electrostatic