Improve the reliability and Increased lifetime of Comb Drive structure in RF MEMS Switch
Publish place: Fifth International Conference on Electrical and Computer Engineering with Emphasis on Indigenous Knowledge
Publish Year: 1396
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
COMCONF05_080
تاریخ نمایه سازی: 21 اردیبهشت 1397
Abstract:
This paper presents a novel electrostatic comb-drive RF MEMS switches for the purpose of increasing reliability of micro-electromechanical switches, some new designs analyzed for elimination of adhesion, friction and dielectric charging in non-contact switches, targeted to decrease electrostatic force and applied voltage in the comb driven structure. The reason of this choice is simple manufacturing process (1 or 3 masking) compared to the other MEMS structures, ability to build with more material, linear functioning without static spring fingers, wide applications in addition to switches, such as Resonators, micro-filters, gyroscopes, accelerometers etc.
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Authors
Faraz delijani
Department of Electrical Engineering Arak Branch, Islamic Azad University
Azim Fard
Communication Regulatory Authority