Electrostatic MEMS switch with vertical beams and body biasing

One of the easiest and the most appropriate solution for fabricating MEMS switch is Electrostatic actuation. However, it requires large parallel plates which can take a large surface on the substrate wafer and thus an expensive fabrication cost. In this paper, an improved electrostatic MEMS switch is presented. The proposed design is carried out so that it minimizes the dimensions of the MEMS device. Simulation results are also done by COMSOL based on the proposed design

Keywords:

Switch , electrostatic actuator , micro electro mechanical systems , bulk terminal , vertical beams , pull-in voltage