Nano zone drift prediction for nano scale manufacturing with nano robots

In this paper, drift is described as remained error after hysteresis and creep compensation and could seriously affect the SPM's performance. However thermal drift is introduced as the major part of total drift in the literature, total drift has several origins such as temperature, heat generation in system components, humidity existence and chemical properties, and should be explained with an acceptable model. This paper is organized to solve this problem for nanoscale parts. Using this paper, a comprehensive model could be introduced that is effective, simple and mathematically traceable. Final conclusion shows that this paper is very useful for drift prediction.

Keywords:

Nano , drift prediction , nano manufacturing , nanorobot , Scanning Probe Microscope