Coupled Electromechanical Behavior of a Piezoelectric Sandwich Micro-Beam

In this paper mechanical behavior of a fixed-fixed micro-beam bonded with two piezoelectric layers is investigated. The micro-beam is suspended over a fixed substrate, and equipped with ultra-thin surface electrodes. The micro-beam is actuated by both poling the piezoelectric layers through the thickness and the electrostatic pressure by applying electrostatic voltage to the fixed substrate. The electromechanical coupled equations governing the problem are derived based on Euler-Bernoulli beam theory considering the voltage applied to the piezoelectric layers and based on electrostatic Maxwell’s equations. The obtained nonlinear equation is solved by step by step linearization method and Galerkin’s weighted residual method. The obtained results are compared with the results of a model in the absence of the electric potential distribution.

Keywords:

MEMS , Piezoelectric , SSLM , Potential , Micro-beam