Design and Simulation of High Tuning range and High Quality factor MEMS Variable Capacitor in Standard CMOS Technology

This article is organized to represent the work specifications of micro electro mechanical gap-tuning capacitors and to increase the both of tuning range and quality factor, a three-plate capacitor which can be fabricated in standard ۰.۱۸ μm CMOS technology is designed and simulated. The simulation of the capacitor was done using the EM۳DS software and the simulation results show tuning range of ۱۰۰%, that is ۲ times higher than tuning range of the conventional parallel plate capacitor. The plates of this capacitor are designed by using the available metal layers in the TSMC ۰.۱۸ μm CMOS technology that have caused decreasing the series resistance and increasing  the quality factor to ۳۰۰ in ۱ GHZ.

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