A short introduction to MEMS sensors and piezoelectric materials, including zinc oxide and materials that work well with it.

This research project is concerned with the enhancement of piezoelectric properties in materials employed in the construction of mems sensors. Particular attention is paid to the materials ZnO, PZT, SiO₂, AlN, and Si₃N₄. MEMS sensors, which are widely implemented in biomedical, biomechanical, and aeronautical applications, rely on piezoelectric materials to achieve cost-effective and compact detection capabilities. In this study, we investigate potential modifications in the composition and microstructure of these materials to enhance sensitivity and reactivity in detecting physical and chemical changes, with a particular focus on applications involving gas detection (e.g., CO and CO₂). By optimizing these materials, our objective is to advance MEMS sensor technology and expand its industrial applications.

A short introduction to MEMS sensors and piezoelectric materials, including zinc oxide and materials that work well with it. Keywords:

microelectromechanical system (MEMS) sensors , piezoelectric , ZnO , PZT , SiO₂ , AlN , Si₃N₄