An Improved Si MEMS Pirani Gauge and the Electrothermal MATLAB Modelling

Nowadays pressure gauges are widely used inmilitary and commercial industries, so it makes these gaugesvery important devices. Pressure gauges are very different instructural modelling and sizes. In this paper a new micro-Pirani gauge has been designed and simulated that simplifiesthe process of fabrication of micro Pirani vacuum gauges. Inaddition performance of micro Pirani gauges based on MEMStechnology and mathematical equations of heat transfer andpressure equations in micro Pirani gauges are discussed.These equations and terms are simulated in MATLABSIMULINK by considering these conditions: Pertaining microbridge temperature in 49.5 ̊C; The micro bridge is surroundedby dominant Nitrogen gases; It is considered that heat transferis mostly done by transferring heat loss between micro bridgeand the surrounded gases; The heater is a lossless thermalconductor. In this paper system level simulation is done whichincludes some blocks that represent physical and electricalproperties of the micro bridge. Eventually by considering aboveconditions and dimensions of micro bridge, which has 1 μmwidth, 1000 μm length, and thickness of 0.5 μm, we get to newmicro Pirani gauge by precision of 1 Torr.

Keywords:

MEMS , Micro Bridge , Pressure , PiraniGauge