Design, Simulation and optimization of Midinfrared Ultrabroadband HCG mirrors for 2.3μm VCSELs

We present the design of two Si/SiO2 subwavelength high contrast grating mirrors. These mirrors are optimized for integration in mid-infrared VCSEL. We tried to optimize these structures for having an ultrabroadband mirror which has the polarization selection ability. We have proposed two structures. The first one, we optimized the structure to provide the largest bandwidth as possible for reflections above 99% and 99.9% respectively. Then, in second one, we optimized the structure for better TE mode suppression and better stability in design parameters changes. Finally higher order modes suppression verified and results shows very good mode suppression for degrees above 5 and 13 for both structures respectively.

Keywords:

vertical cavity surface emitting laser (VCSEL) , subwavelength high contrast grating , Midinfrared , Tm and TE polarization