3D Free Space Micromirror Device with Combination of Electromagnetic and Bimetal Actuators
Publish Year: 1394
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
RSTCONF01_652
تاریخ نمایه سازی: 30 آبان 1394
Abstract:
A 3D free space micromirror utilizing both electromagnetic and bimetal actuators based on microfabrication processes is designed. Beneficiary points using hybrid actuator are reliability, energy performance and amplitude of deflections. This mirror is designed of single crystalline Silicon and Aluminum layer. The fabrication process of this micromirror is significant point. Finally, the design analyzed by finite elements method in Comsol Multiphysics Software and presented
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Authors
Ahmad R. Norouzi
Faculty of New Sciences & Technologies University of Tehran Tehran, Iran
Alireza Nikfarjam
Faculty of New Sciences & Technologies University of Tehran Tehran, Iran
Hassan Hajghassem
Faculty of New Sciences & Technologies University of Tehran Tehran, Iran