A CAD model of DC-contact MEMS series switch

Radio frequency micro electromechanical systems (RF MEMS) switches are good candidates to replace the conventional electronic switches. A number of MEMS finite element software were introduced recently to model RF MEMS switches. In this paper, modelling of a DC-contact MEMS series switch was carried out using Computer Aided Design (CAD) software. A micro cantilever switch in coplanar waveguide configuration was presented using a One-dimensional approach. An analytical model was used to predict the dynamics of the device. Electromagnetics analyses were also carried out to obtain some of the important switch characteristics (e.g. switching time, pull down voltage, spring constant, isolation, and insertion loss).