Performance Analysis of Microsystems in the Presence of Pull-In Instability
Publish Year: 1394
Type: Journal paper
Language: English
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Document National Code:
JR_JKBEI-2-4_006
Index date: 7 September 2016
Performance Analysis of Microsystems in the Presence of Pull-In Instability abstract
Objective of the current work is to represent performance analysis of microsystems in the presence of pull-in instability phenomenon To this end, the Euler-Bernoulli beam theory and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM) is employed to solve the nonlinear partial differential governing equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeeze-film damping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-in instability of poly-silicon micro-beam is strongly size-dependent. It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.
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Performance Analysis of Microsystems in the Presence of Pull-In Instability authors
Emran Khoshrouye Ghiasi
Department of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad, Iran