Growth and Structure of carbon nanotubes using selected catalystsby CVD method

DLC nano-structures have attracted extensive research interest since their discovery in 1970 by Aisenberg using the ion beam deposition (IBD) method [1]. This is due to their unique and interestingmechanical, chemical, and electrical properties [2-3] as well as wide range of potential applications [5].We also studied the effect of Co catalyst separately, on the synthesis, structure and morphology of DLCs on the substrate of glass in the PECVD system. The diamond-like carbons produced under the same conditions were characterized used Scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman Spectroscopy and Atomic Force Microscopy (AFM).

Keywords:

Diamond-like carbon , DC-PECVD , Catalyst , AFM , XRD , Raman spectroscopy , SEM