Simulation of Bayard Alpert ionization vacuum gauge with COMSOL

In this paper, the Bayard Alpert ionization vacuum gauge has been simulated using COMSOL. Employing Charged Particle Tracing (CPT) tool in COMSOL, the sensitivity coefficient of the gauge has been calculated from simulation results. Based on the results, the average measured value of sensitivity is 30, which shows compatibility with theoretical value of 28. It must be mentioned that a unique method is used in this article to calculate the sensitivity coefficient and the coefficient diagrams for sensitivity of different vacuum pressures have been obtained through these simulations. This paper also presents a method for obtaining electron velocity and energy and their diagrams

Keywords:

ionization vacuum gauge , vacuum sensor , hot cathode ion gauge , Batard Alpert ion gauge