Simulation and Derivation of deflection Equation for suspended diaphragm for MEMS Application Uaing Kirshohff-Love Theory
Publish place: Journal of Iranian Association of Electrical and Electronics Engineers، Vol: 15، Issue: 4
Publish Year: 1397
نوع سند: مقاله ژورنالی
زبان: English
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شناسه ملی سند علمی:
JR_JIAE-15-4_003
تاریخ نمایه سازی: 6 اسفند 1398
Abstract:
In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understanding its behavior and calculating its other practical parameters both in dynamic and static fields. Here, using the thin sheet Kirchhoff-Law theory these issues are addressed. The results of analysis and simulation have been compared with each other, representing the 1% accuracy of the obtained statements, suggesting accuracy of the obtained results. The results show that the suspended diaphragm has greater deflection compared to simple flat diaphragm, which is considered important in sensors and micro electromechanical devices
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Authors
Mohammad Reza Mahlooji
M.S student, Faculty of New Sciences & Technologies, University of Tehran, Tehran, Iran
Javad Koohsorkhi
Assistant Professor, Advanced Micro and Nano Devices Lab., Faculty of New Sciences & Technologies,University of Tehran, Tehran, Iran