Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation

This paper presents the couple filed simulation with ANSYS software on one of the developed capacitive RF MEMS switches with serpentine spring to estimate the pull in voltage [1]. The study permits to see how serpentine spring with different number and dimension of meanders can be affected on the pull in voltage. With this study we could decrease the pull in voltage from 15 volt to 6.2 volt.

Keywords:

Serpentine spring , Capacitive RF MEMS Switch , Pull in Voltage

Authors

Reza Ayaseh

Department of Electrical Engineering, Islamic Azad University, Tabriz Branch, Tabriz, Iran

Parisa Ture Savadkoohi

Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran

Certificate
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https://civilica.com/doc/869045

شناسه ملی سند علمی:

ELEMECHCONF05_319

تاریخ نمایه سازی: 21 خرداد 1398

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Ayaseh, Reza and Ture Savadkoohi, Parisa,1397,Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation,Fifth International Conference on Quality Research in Electrical and Mechatronics Electrical Engineering,Tehran,https://civilica.com/doc/869045

Scientometrics

The specifications of the publisher center of this Paper are as follows:

Ranking of Islamic Azad University of Tabriz

Type of center: Azad University

Paper count: 16,337

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