Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation
Publish place: Fifth International Conference on Quality Research in Electrical and Mechatronics Electrical Engineering
Publish Year: 1397
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
ELEMECHCONF05_319
تاریخ نمایه سازی: 21 خرداد 1398
Abstract:
This paper presents the couple filed simulation with ANSYS software on one of the developed capacitive RF MEMS switches with serpentine spring to estimate the pull in voltage [1]. The study permits to see how serpentine spring with different number and dimension of meanders can be affected on the pull in voltage. With this study we could decrease the pull in voltage from 15 volt to 6.2 volt.
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Authors
Reza Ayaseh
Department of Electrical Engineering, Islamic Azad University, Tabriz Branch, Tabriz, Iran
Parisa Ture Savadkoohi
Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran