Extracting Modal Properties of an Anti Vibration Table by Ambient Vibrations, Hammer Impulse and Numerical Solutions

To prepare a clean of vibration environment for microelectronic microscopes an anti vibration table is built. Mode shapes of the table are extracted by means of finite elemnt methods and experimental tests, which includes hammer impulse and ambient vibrations methods . It is shown that there is a very good congruence between numerical and experimental approaches. To evaluate the performance of table without using any other facility a discussion on optimum location of air springs is performed.