The Influence of Heat Treatment on the Structural and Morphological Properties of ITO Thin Films
Publish place: 3rd International Conference on Materials Heat Treatment
Publish Year: 1391
Type: Conference paper
Language: English
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Document National Code:
ICMH03_057
Index date: 11 July 2012
The Influence of Heat Treatment on the Structural and Morphological Properties of ITO Thin Films abstract
Indium tin oxide (ITO) thin films with composition of 10 wt% SnO2 and 90 wt% In2O3, and impurities balanced on glass substrates at room temperature were prepared by electron beam evaporation method and then was heated in air atmosphere at temperature 200 oC for 1 h. The influence of heat treatment on the structural and morphological properties of the films was studied. The film structure and surface morphologies were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). XRD patterns showed that heat treatment caused the crystallinity of thin films. Also, the structural studies by XRD reveal that the films exhibit preferential orientation along (2 2 2) plane. AFM results reveal that the heat treatment leads to an increase of surface roughness. This behavior is due to the aggregation of the native grains into the larger clusters upon heating. This different cluster size influences the surface morphology of the films
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