Design, Analysis and Comparison of Multilayer Electro Thermal Micro Actuators for MEMS Application

This paper presents the design, analysis and comparison of two different types of multilayer electro thermal actuators for MEMS application, consisting of Titanium (Ti), Silicon Dioxide (SiO2) and Poly-Silicon (poly-Si). Deflection, temperature and force analyses have been carried out for a range of applied voltages within 5V using the software CoventorWare. The types of actuators designed and analyzed in this work are solid cantilever actuator and slotted U-beam type cantilever actuator. At first, the solid cantilever actuator has been analyzed by applying a potential difference across the ends of Ti layer for different thickness of the actuator. Then the slotted cantilever of U-beam type has been analyzed by applying a potential difference across the fixed ends of the Ti layer. Comparison between solid and U-beam type actuators has been made. It has been observed that the deflection of the actuator decreases with increase in the thickness of each layer. However the temperature and the force at the fixed end increases. On comparing the results of the solid and the U-beam it has been observed that even though the deflection of the U-beam is less than that of the solid beam the temperature and the force at the fixed end in case of U-beam is also very much lesser which increases the controlling limit of the device in terms of applied voltage. Thus it has been found that selection of U-beam type slotted cantilever is preferable over the solid cantilever.

Keywords:

MEMS , Micro , Actuator , Electro thermal