A Fuzzy Inference System to Maintain Ultrasonic Cleaning Bath Efficiency for Semiconductor Applications
Publish place: The 22nd Iran Fuzzy Systems Conference
Publish Year: 1402
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
ICFUZZYS22_027
تاریخ نمایه سازی: 14 مرداد 1403
Abstract:
In this paper, fuzzy control concept is adopted to straightforwardly construct acontroller to maintain ultrasonic cleaning bath efficiency. The aforementioned schememakes use of bath turbidity and temperature to maintain the generated power whichis delivered to the ultrasonic generating element. The single output power surfacewas generated by implementing Mamdani fuzzy inference system and the results werediscussed.
Keywords:
Fuzzy Controller , Ultrasonic Cleaning , Fuzzy Inference System (FIS) , Smart Systems , Artificial Intelligence (AI)
Authors
Ali Rezaei
Iran University of Science and Technology, Electrical Engineering School, Tehran, Iran
