Design and Modeling of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) using COMSOL Multiphysics software for breast cancer imaging

The primary objective of this research was to evaluate a piezoelectric micromachine ultrasonic transducer (PMUT) to work at lower frequency ranges and operate at lower voltage for higher penetration, aiding imaging for early detection of breast cancer. That is one of the most common cancers among women. More specifically, the principle of operation is analyzed to investigate the effect of critical parameters on resonant frequency and acoustic output pressure for circle geometry. The COMSOL Multiphysics software analyzes the optimal value for the vital parameters such as radius, thickness and applied AC voltage. The results show that the output acoustic pressure for an input voltage of ۱۰ V in a circular PMUT with a piezo layer radius of ۱۵۰ um is ۲۰ kPa at ۲.۰۲۳ MHz. The outcomes indicate that the proposed PMUT design can deliver acoustic pressure at a lower frequency range to increase the penetration depth.

Keywords:

piezoelectric micromachine ultrasonic transducer (PMUT) , Resonant frequency , Acoustic output pressure , Breast cancer.