Modeling of Capacitance and Sensitivity of a MEMS Pressure Sensor with Clamped Square Diaphragm

In this paper, for the first time, the modeling of capacitance and sensitivity for MEMS capacitive pressure sensor with clamped square diaphragm is presented. In capacitive sensor the sensitivity isproportional to deflection and capacitance changes with pressure. Therefore, first the diaphragmdisplacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and thensimulated using finite element method (FEM). It can be seen that the analytical results agree withsimulation. The results also show that the high sensitivity can be achieved by decreasing the diaphragm thickness and increasing its size.

Keywords:

MEMS , Modeling , Displacement , Capacitance , Sensitivity