A Hybrid EM/Circuit Design Method For 6-Bit Distributed Ka– Band MEMS Phase Shifter

This paper presents analysis and design of 6-bit microelectromechanical systems (MEMS) phase shifters over Ka-band, based on the distributed microelectromechanical transmission-line (DMTL). A DMTL phase shifter consists of periodically MEMS variable (or switched) capacitors, and operates based on dispersion. By increasing the distributed capacitance on a transmission line, the phase velocity decreases, providing a differential phase shift. It is observed that the DMTL phase shifter can be accurately modeled using a combination of full-wave electromagnetic and microwave circuit analysis. The full-wave electromagnetic simulation of the unit cell is done by finite element using Ansoft High Frequency Structure Simulator (HFSS). After the full wave analysis is performed, S-parameters are extracted in the frequency range going from 26 to 40 GHz for different widths and heights of the MEMS bridge. Finally, the S-parameters are combined to obtain the overall phase shifter performance over Ka-band.

A Hybrid EM/Circuit Design Method For 6-Bit Distributed Ka– Band MEMS Phase Shifter Keywords:

MEMS , phase shifter , switch , full-wave analysis , Scattering , matrix , T-matrix