Effect of voltage on the structure and electrical properties of direct current (DC) magnetron sputter-deposited copper films on glass substrate
Publish place: 10th joint meeting of the 5th International Conference on Materials and Metallurgical Engineering Society and Iranian Foundry Society
Publish Year: 1395
نوع سند: مقاله کنفرانسی
زبان: English
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شناسه ملی سند علمی:
IMES10_040
تاریخ نمایه سازی: 6 اردیبهشت 1396
Abstract:
In the present study, 200-nm thick copper films are successfully deposited on glass substrate by direct current magnetron sputtering technique. The effect of the sputtering voltage (100 V - 300 V) on the structure and electrical properties of the deposited films are studied. The composition, morphology and structure of the films are investigated by energy dispersive x-ray spectroscopy (EDAX), scanning electron microscopy (SEM) and X-ray diffraction (XRD) analysis, respectively. The results show that the crystallinity of the films increases pronouncedly as the sputtering voltage increases from 100 V to 150V. At all sputtering voltages; the films grow with their {111} planes parallel to the film surface. Higher voltages favor directional growth but the preferred {111} growth direction remains the same. The resistivity of the films sharply decreases at the voltage of 100V. Further increase in the voltage results in a slight decreasing trend in resistivity and at the voltage of 300V the resistivity reaches the value of 4.6125 Ω/sq.
Keywords:
Thin film , Copper , Direct current magnetron sputtering , Voltage , Structure , Electrical conductivity
Authors
Sedigheh Pirsalami
Ph.D. student, Materials Engineering Department of Materials Science and Engineering, School of Engineering, Shiraz University, Shiraz, Iran
Seyyed Mojtaba Zebarjad
Professor, Materials Engineering Department of Materials Science and Engineering, School of Engineering, Shiraz University, Shiraz, Iran
Habib Daneshmanesh
Professor, Materials Engineering Department of Materials Science and Engineering, School of Engineering, Shiraz University, Shiraz, Iran
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