Electrostatic MEMS switch with vertical beams and body biasing
Publish place: 2nd International Conference on Electrical Engineering
Publish Year: 1396
Type: Conference paper
Language: English
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Document National Code:
ICELE02_359
Index date: 26 February 2018
Electrostatic MEMS switch with vertical beams and body biasing abstract
One of the easiest and the most appropriate solution for fabricating MEMS switch is Electrostatic actuation. However, it requires large parallel plates which can take a large surface on the substrate wafer and thus an expensive fabrication cost. In this paper, an improved electrostatic MEMS switch is presented. The proposed design is carried out so that it minimizes the dimensions of the MEMS device. Simulation results are also done by COMSOL based on the proposed design
Electrostatic MEMS switch with vertical beams and body biasing Keywords:
Switch , electrostatic actuator , micro electro mechanical systems , bulk terminal , vertical beams , pull-in voltage
Electrostatic MEMS switch with vertical beams and body biasing authors
Armin Bahmanyaran
university of Shahid Beheshti Tehran, Iran
Kian Jafari
university of Shahid Beheshti Tehran, Iran