Annealing temperature effect on the properties of untreated and treated copper films with oxygen plasma
Publish place: Journal of Theoretical and Applied Physics، Vol: 8، Issue: 3
Publish Year: 1393
نوع سند: مقاله ژورنالی
زبان: English
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شناسه ملی سند علمی:
JR_JTAP-8-3_003
تاریخ نمایه سازی: 27 مرداد 1397
Abstract:
In this work, the copper films were deposited onquartz substrates by DC magnetron sputtering method andthen, the prepared films were annealed in air atmosphere atdifferent annealing temperatures. Before annealing, some ofthe copper films, treated by oxygen plasma, for comparison ofthe results. The structural and morphological properties of thefilms have been investigated using X-ray diffraction (XRD),atomic force microscopy, and four point probe techniques.XRDresults exhibited that the cuprous oxide phase changes tocupric oxide by enhancing of annealing temperatures. Also,oxygen plasma treatment can cause the better crystallinity forthe prepared copper oxide films. The results confirm thatoxygen plasma treatment, affected the crystal size, grain size,average roughness, sheet resistivity and strain of the films.Theoptical characteristics of the oxygen plasmatreated films, suchas refractive index, extinction coefficient and absorptioncoefficient were calculated by straight forward method proposedby Swanepoel using transmittance measurements.Moreover it was found that annealing temperature augmentationlead to decrease the optical band gap energy calculatedusing Tauc’s relation from 2.45 to 1.80 eV.
Keywords:
Copper oxide Oxygen plasma Annealing temperature Optical properties
Authors
Alireza Hojabri
Department of Physics College of Basic Sciences, Karaj Branch, Islamic Azad University, Alborz, Iran
Fatemeh Hajakhari
Department of Physics College of Basic Sciences, Karaj Branch, Islamic Azad University, Alborz, Iran
Nasrin Soltanpoor
Department of Physics College of Basic Sciences, Karaj Branch, Islamic Azad University, Alborz, Iran
Maryam Sadat Hedayati
Department of Physics College of Basic Sciences, Karaj Branch, Islamic Azad University, Alborz, Iran