Dynamic pull-in analysis of Circular and Rectangular microplates under the squeeze-film damping effect

In this paper, effect of squeeze film damping on the Dynamic response of rectangular and circular singlelayer micro plates is studied. To simulate the squeeze film damping effect, squeezed fluid and plate equations are coupled and implemented to the problem. Application of finite element method, first-order shear deformation theory and Reynolds equations are used to model dynamical system. Using finite element method (FEM) dynamic pull-in phenomenon of circular and rectangular micro plates under the actuation of nonlinear electrostatic force andsqueeze film damping is studied. Comparing the results shows these analyses in good agreement with available literatures.

Keywords:

pull-in voltage , squeeze film damping , electrostatic actuation , Dynamic response , finite element model