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Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation

Publish Year: 1397
Type: Conference paper
Language: English
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ELEMECHCONF05_319

Index date: 11 June 2019

Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation abstract

This paper presents the couple filed simulation with ANSYS software on one of the developed capacitive RF MEMS switches with serpentine spring to estimate the pull in voltage [1]. The study permits to see how serpentine spring with different number and dimension of meanders can be affected on the pull in voltage. With this study we could decrease the pull in voltage from 15 volt to 6.2 volt.

Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation Keywords:

Serpentine spring , Capacitive RF MEMS Switch , Pull in Voltage

Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation authors

Reza Ayaseh

Department of Electrical Engineering, Islamic Azad University, Tabriz Branch, Tabriz, Iran

Parisa Ture Savadkoohi

Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran